Abstract
Surface electronic properties using scanning low energy electron probe (SLEEP) techniques have been studied in conjunction with surface chemical properties using Auger electron spectroscopy (AES). Some examples of SLEEP measurements such as scanning TV surface work function and secondary emission displays, work function and surface field distributions using sampling techniques, and determination of thin film dielectric constant and resistivity will be described. Observed correlation between the variation of work function from SLEEP and changes in surface chemical properties using AES will be shown for some electronic applications. The use of SLEEP as a means for determining surface changes caused by other techniques such as AES will also be discussed.
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