Abstract
A delay-line-type surface acoustic wave (SAW) sensor based on a zinc oxide (ZnO) sensitive layer was developed. Two types of sensitive layers were obtained: ZnO nanowires and ZnO thin films, both deposited using laser methods (VLS-PLD and PLD, respectively) onto quartz substrates. The responses of sensors with two different nanowire lengths (300 and 600 nm) were compared with those of sensors with thin films of different thicknesses (ca. 100 and 200 nm) to different concentrations of hydrogen and deuterium. The experimental results revealed a high response at low concentrations and a rapid saturated response for nanowires, but a low response at low concentrations and a linear response to much higher gas concentrations for the thin-film-based SAW sensors.
Highlights
A high sensor sensitivity and short response time are key in gas detection
The surface acoustic wave (SAW) sensor response was measured for the four SAW sensor active surface morphologies The SAW sensor response was measured for the four SAW sensor active surface morphologies for for hydrogen and deuterium concentrations up to 2%
The nanowire-based sensors had a higher response at low deuterium concentrations, concentrations, while detection for the thin-film sensors started at ca. 0.3%
Summary
A high sensor sensitivity and short response time are key in gas detection. SAW sensors have been used with optimal results for the detection of different gases, such as hydrogen [6,7,8], CO2 [9], and CH4 [10], detection of humidity [11,12], etc. Deuterium was detected with a SAW sensor here for the first time. It has previously been reported that SAW sensors can well detect hydrogen using sensitive films of different materials such as ZnO3 [13,14,15], Pd [16,17], and WO3 -Pd [18]
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