Fabrication of SAW device by using Zno thin film as a sensing area

Abstract

The limitation of human five main senses to detect the Nano-scale organism has introduced the idea for researcher in development several kinds of devices or sensors. The Surface Acoustic Wave (SAW) devices which wisely use in telecommunication field at the early time had been integrated into biosensor which able to detect the microorganism in aqueous state. Typically, a SAW sensor will have three elements which are transducers, sensing area and electronic signal processor. Zinc Oxide (ZnO) thin film use as piezoelectric substrate while metallic material as Inter Digital Transduces (IDTs). The new device structure which replaces the sensing area by using ZnO metal oxide layer is conducted in this study. Hence, the purpose is to investigate the behavior of various sizes of ZnO metal oxide layer as sensing area for the SAW device. Conventional lithography and Therefore, ZnO thin film layer by Sol-gel method is applicable use as SAW device. ZnO Sol-gel coating method were used to fabricate the SAW device. The SAW device with ZnO metal oxide layer shows the attractive result. The electrical characteristic and frequency response were used to assess the behaviour of the SAW device. X-ray Diffraction (XRD) and Atomic Force Microscope (AFM) was used to evaluate the ZnO structures.