Abstract
Surface acoustic wave (SAW) properties of z-cut waveguides fabricated by proton exchange using octanoic acid are investigated. The phase velocity and electromechanical coupling coefficient of SAWs are significantly decreased by the increase of kd, where k is the wavenumber and d is the waveguide depth. The insertion loss IL of a SAW is increased by the increase of kd and becomes nearly constant at . The temperature coefficient of delay TCD of a SAW calculated from the frequency change shows an apparent increase with kd, reaching a maximum at , then slightly decreasing at higher kd. On the other hand, the effects of annealing on and IL are also investigated. The results show that post-annealing can result in a restoration of the decreased and an improvement of IL.
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