Abstract
The fundamental acoustic properties of amorphous Ta2O5 and Nb2O5 thin films prepared by RF sputtering were evaluated using a Rayleigh-type surface acoustic wave (SAW) on 128° YX-LiNbO3 and a shear-horizontal-type SAW on 36° YX-LiTaO3. The elastic constants c11 and c44 of the thin films were determined from the measured phase velocities of two SAW modes with mutually perpendicular particle motion. Although the elastic constants of the Ta2O5 thin film were found to be approximately 14–17% larger than those of the Nb2O5 thin film, it was clarified that the Ta2O5 thin film has a stronger SAW trapping effect than the Nb2O5 thin film because the density of the former was measured to be 1.5 times higher than that of the latter. On the other hand, the Nb2O5 thin film has a smaller propagation loss for a Rayleigh-type SAW, a lower temperature coefficient of delay, and a higher refractive index than the Ta2O5 thin film.
Published Version
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