Abstract
AbstractFabrication of surface acoustic wave (SAW) based phononic crystal (PC) device by femtosecond laser micromachining has been demonstrated. The thin‐film interdigital SAW transducers of 50 μm wavelength together with PC structure (1‐ and 2‐dimensional) of 25 μm period were fabricated on the YZ lithium niobate crystal surface by femtosecond pulse selective ablation of an aluminum layer. The device S parameter measurements revealed different influence of 1D and 2D PC structures on the SAW propagation. © 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:1286–1287, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26789
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