Abstract
The propagation of a surface acoustic wave (SAW) between interdigital transducers is demonstrated at a frequency of ∼24 GHz. The elevated-order guided Rayleigh modes in AlN/SiC(0001) structures have a velocity as high as that of the transverse bulk sound wave in SiC with a polarization parallel to the c-axis. The significantly high frequency is accomplished at the SAW wavelength of 300 nm by adjusting the overlayer thickness to be about the threshold thickness for the second-order Rayleigh mode in order to maximally benefit from the SAW velocity.
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