Abstract
Hydrogen diffusion in p-type Czochralski silicon is investigated by combined Raman spectroscope, scanning electron microscope, and spreading resistance probe measurements. Exposure of silicon wafers to rf hydrogen plasma results in the formation of platelets. The increase of hydrogenation duration leads to the growth of the platelets and the reduction of the hydrogen diffusivity. The large platelets grow faster than the small ones. The growth of the platelets is based on the capture of hydrogen. The dependence of the hydrogen diffusivity upon the average size of the platelets suggests that the indiffusion of hydrogen is suppressed by the platelets.
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