Abstract

The effect of graphite carbon nanolayers on the phase change performance and microstructure of Zn15Sb85 film was systematically studied. After the addition of graphite carbon nanolayers, superlattice-like films exhibit better thermal stability and data retention, especially [C(4 nm)/Zn15Sb85(10 nm)]5 superlattice-like film. The phase change memory based on [C(4 nm)/Zn15Sb85(10 nm)]5 has fast operating speed and ultralow power consumption. During the aging process, the electronic structure of [C(4 nm)/Zn15Sb85(10 nm)]5 superlattice-like film remains almost unchanged. The results of x-ray diffraction and transmission electron microscopy indicate that the addition of graphite carbon nanolayers reduces the grain size. The formation of new C–Sb and C–Zn bonds was speculated through energy dispersion spectroscopy and x-ray photoelectron spectroscopy. The results indicate that graphite carbon nanolayers play an important role in improving the thermal stability, operating speed, reducing power consumption, and resistance drift of Zn15Sb85 films.

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