Abstract
We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 μm to 3 μm. The devices achieve the saturated internal detection efficiency at a wavelength of 1.55 μm and exhibit maximum count rates in excess of 105 s−1. We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred micrometers exhibit critical currents in excess of 50% of the depairing current. A meandered detector with a 2.0 μm wire width is demonstrated over a surface area of 362 × 362 μm2, showcasing the material and device quality achieved.
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