Abstract
A super-resolution method in projection-type x-ray imaging is proposed. In this method, interference fringes generated with a two-beam interferometer are used for detecting the fine periodic structure of the object. When the sample has a fine periodic structure, the structure can be detected as interaction between the periodic structure of object and the standing wave formed by the two-beam interferometer. Feasibility studies have been carried out using wavefront-division interferometer with total-reflection-mirror optics and a resolution test chart as a model sample. The fine structures with a period up to 100 nm were detected as modulation of transmitting x-ray intensity at 11.5 keV.
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