Abstract
An algorithm for selecting the correct starting point for computer optimization of a two-mirror scanner with a meniscus lens is developed for use in laser machining. This algorithm performs joint analysis of aplanatism condition fulfillment and the field characteristics of the ghosts reflected from the meniscus surfaces back into the scanner mirror space. For integrity, all equations and estimates are given with respect to a major parameter: the curvature of the input surface. The second powerful tool for the optimization is the distance from the meniscus to the scanning mirrors, though its applicability is significantly limited by design considerations. Several scanner variants used to perform basic laser machining processes at various power levels are considered in detail. It is found that, for a fixed output numerical aperture, compacting the scanner always improves its optical performance. In general, compacting is an alternative to using scanners in systems with high-power laser sources. The results of this work are valid for any optical material and wavelength and are particularly relevant for systems based on CO2 lasers, in which such scanners remain widely used.
Highlights
Preobjective scanning systems are widely used in laser machines, because they combine very high-positioning speed with sufficiently high accuracy and relatively low cost
They consist of a two-mirror scanner and an optical system corrected for field curvature
In the scanning module for a CO2 laser machine, the optical system often contains only a meniscus singlet, which is an integral component of most field flatteners.[1,2]
Summary
Preobjective scanning systems are widely used in laser machines, because they combine very high-positioning speed with sufficiently high accuracy and relatively low cost They consist of a two-mirror scanner and an optical system corrected for field curvature. FGR field interaction with the mirror surface is a considerable problem for a high-brightness CO2 laser machine with ZnSe optical components. The primary objective of this study is to develop a detailed algorithm for finding a starting point for computer optimization, to provide the system with the optimal optical performance and prohibit focused ghost spots that could cause scanner mirror damage. This goal is achieved by combining computer modeling and geometric and matrix optics.
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