Abstract
A tunable MEMS Fabry-Perot infrared filter with subwavelength structured reflectors substituting state of the art Bragg reflectors is presented. The reflectors consist of a disc resonator array arranged on a membrane carrier. The subwavelength structures were simulated and optimized by finite difference time domain analysis in order to achieve high peak transmittance for a desired wavelength. Nano imprint lithography was used to fabricate the subwavelength structures at wafer level. Tuning voltages up to 80 V change the distance between both reflectors by electrostatic forces. Measurement results show high peak transmittance of more than 50% within a wavelength range from 2.5μm to 6.5μm.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
