Abstract
Touchscreens are human–machine interfaces widely used in information and telecommunication products. This study used a transparent aluminum nitride (AlN) film with hardness exceeding 20 GPa in the development of antireflective SiOx–AlN multilayer films in order to obtain high hardness as well as high transparency. To one side of the glass substrate, a four-layer AlN–SiOx antireflective structure is applied to enhance transparency. On the other side of glass substrate, a thick AlN film is applied to serve as an antiscratch hard layer with an additional AlN/SiOx nano-double-layer to enhance overall transparency. Indentation measurements to a depth of 200 nm revealed hardness values of 21.18 GPa, and the average transmittance was measured at 92.89% in the visible light range (400–700 nm). The transparency of the specimens in this study is superior to that of common glass and provides hardness values 3.5 times higher.
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