Abstract
The substrate temperature has been measured and controlled by an adaptively calibrated pyrometer during the YBa/sub 2/Cu/sub 3/O/sub 7/ film deposition process. The experimental results show that a feedback control system based on this pyrometer can maintain the substrate temperature accurately at a set value. Thermal problems associated with the fabrication of multilayer structures are discussed. The study demonstrates accurate substrate temperature measurement and control for large-area film growth, facilitating the fabrication of high-quality superconducting electronic devices. >
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