Abstract
In this research, TiO2 nanostructured thin films were deposited on glass substrates at different substrate temperatures by the electron beam physical vapor deposition method. The crystalline structure, surface morphology, and optical properties of the thin films were investigated by X-ray diffraction, field emission scanning electron microscopy, and UV-Vis spectrophotometry, respectively. The hydrophilic and photocatalytic activities of the thin films during UV irradiation were evaluated by water contact angle measurement and methylene blue degradation. The optical properties showed that substrate temperature did not have significant effect on the transparency of the TiO2 thin films. In addition, water contact angle measurements and methylene blue degradation indicated that the TiO2 thin film deposited at 300 °C had the best hydrophilic and photocatalytic properties.
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