Abstract
Abstract The method for deposited flow with substrate interaction investigation named as “Knudsen mesh” method is developed. The substrate surface effect on laser plasma plume under condition corresponding to YBaCuO film deposition is studied by this method used in conjunction with time-of-flight mass spectrometry. The plume characteristics near surface (particle composition and velocities, shock layer formation dynamics) are obtained. It is found that oxygen containing clusters are formed effectively within shock layer near substrate.
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