Abstract
Flexible active matrix display technology has been adapted to create new flexible photo-sensing electronic devices, including flexible X-ray detectors. Monolithic integration of amorphous silicon (a-Si) PIN photodiodes on a flexible substrate poses significant challenges associated with the intrinsic film stress of amorphous silicon. This paper examines how altering device structuring and diode passivation layers can greatly improve the electrical performance and the mechanical reliability of the device, thereby eliminating one of the major weaknesses of a-Si PIN diodes in comparison to alternative photodetector technology, such as organic bulk heterojunction photodiodes and amorphous selenium. A dark current of 0.5 pA/mm2 and photodiode quantum efficiency of 74% are possible with a pixelated diode structure with a silicon nitride/SU-8 bilayer passivation structure on a 20 µm-thick polyimide substrate.
Highlights
IntroductionFlexible electronics are becoming more prevalent as previously developed flexible active matrix display technology is being implemented to produce a wide variety of photo-based biomedical sensing devices [1,2], including flexible X-ray detectors [3]
The benefits of a pixelated PIN diode structure were evaluated in comparison to full fill factor diodes with respect to flexible X-ray detectors
In addition to demonstrating lower dark current that is more stable with time and having less cross-talk between pixels, the pixelated structure is more robust with respect to flexing and bending of the substrate
Summary
Flexible electronics are becoming more prevalent as previously developed flexible active matrix display technology is being implemented to produce a wide variety of photo-based biomedical sensing devices [1,2], including flexible X-ray detectors [3]. The primary immediate benefit of switching from conventional display glass to flexible substrates in digital radiography is the cost savings associated with the elimination of the significant ruggedization that must be incorporated to limit detector breakage. Though some portable X-ray panels do exist, they are comprised of glass thin film transistor (TFT) panels, and are rather bulky due to the ruggedization required to protect the costly panel from breakage. Given the cost of these panels, it would be advantageous to have a more rugged system that would be less prone to breakage and be much lighter for mobile users to carry
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
