Substoichiometric TiO2 Thin Films as a Support Catalyst for Hydrogen Fuel Cells

Abstract

Substoichiometric titanium oxide films as thin as 25nm were grown using atomic layer deposition (ALD) and determined by x-ray diffraction (XRD) to consist of Magneli phase Ti4O7. These films were synthesized at temperatures as low as 125°C, significantly lower than traditional methods. The films possess high electrical conductivity, making them attractive as potential fuel cells support materials. Titanium oxide nanotubes 70 nm in diameter and 2-3 um long were formed when the deposition was performed over sacrificial porous aluminum substrates.