Highly Conductive and Transparent Hybrid Organic–Inorganic Zincone Thin Films Using Atomic and Molecular Layer Deposition

Abstract

Highly conducting and transparent hybrid organic–inorganic thin films were grown using atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The conducting films were grown at 150 °C by combining ZnO ALD and zincone MLD processes. ZnO ALD was performed using diethylzinc (DEZ) and water (H2O). Zincone MLD was performed using DEZ and hydroquinone (HQ). The ALD:MLD alloys were deposited by controlling the relative number of ALD and MLD cycles in the reaction sequence. The growth of the ALD:MLD alloys was examined using in situ quartz crystal microbalance and Fourier transform infrared spectroscopy studies. The surface reactions during alloy growth were self-limiting, and the ALD and MLD reaction sequences produced linear growth rates. The alloys exhibited exceptional conductivity relative to ZnO ALD films grown at 150 °C. The highest conductivities were obtained from alloys with ALD:MLD cycle ratios of 1:1 and 2:2. The 1:1 and 2:2 alloy films yielded conductivities of 116 and 170 S/c...