Sub-degree per hour split mode tuning fork gyroscope

Abstract

This paper demonstrates a high accurate split mode tuning fork gyroscope with sub-degree per hour stability. The gyroscope sensing element is fabricated in an 80µm-thick SOI process and sealed in a wafer level vacuum package. Interfaced with an ultra low noise CMOS readout circuit, this gyroscope achieves 0.006 deg/√h angle random walk (ARW) and 0.18 deg/h bias instability. Its corresponding zero rate output (ZRO) stability (1σ) reaches 0.64 deg/h, when 1s average time is adopted. Operating in split mode, larger than 100Hz bandwidth and ±300deg/s full scale are obtained simultaneously.