Abstract
Fabrication of SU-8 slab- and ridge-waveguides with holographic grating for DFB laser, effectively utilizing nanoimprint technology (NIL), is presented. Rhodamine-6G-doped SU-8 slab- and ridge-waveguides were embedded in grooves defined by NIL in UV curable resin. Utilization of NIL made it easier to form such a three-dimensional micro structure consisting of ridge stripe and fine corrugation grating. TE-polarized 587nm laser and TE-polarized 594nm light emissions were observed from the slab- and ridge-waveguides, respectively, when the waveguides were irradiated by 532nm pulsed Nd:YAG laser.
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