Study the Optical Properties of Undoped and Antimony Doped Tin Oxide Films Prepared by APCVD Technique

Abstract

In the present study, antimony doped tin oxide (SnO2:Sb) thin films are prepared by atmospheric pressure chemical vapor deposition (APCVD) technique by varying the doping concentration in very small range, 1- 1.4 wt.% at a constant substrate temperature of 480 oC. The effect of Sb-doping concentration on the optical behavior of SnO2 film deposited on glass substrates are analyzed and discussed. Optical measurements showed that the average optical transmittance decreased with increased Sb concentration, and each of absorbance, absorption coefficient and extinction factor were increased in same way and regularly with increasing the concentration of Sb. However the optical reflectance and the refractive index were irregularly increased in same way with increasing the concentration of Sb. A little decrease of energy gap from 3.96 to 4.015 eV with increasing Sb concentration is observed.