Abstract
In large and high power laser facility, Vacuum system is an important subsystem of laser facility. It provides reliable, stable and clean vacuum environment for physical experiments. Because of its huge scale, vacuum system stands on a spread and broad district. The vacuum system is composed of some independent subsystems, and every subsystem is composed of PLC control system. So, distribution network control mode is just adopted for the vacuum control system. Each sub PLC system and main PLC system compose large laser facility vacuum control system. Main control system uses monitor computer to control each subsystem and communicates with upper control system through Ethernet. Field equipments drive the vacuum preparation equipments by switch or data format. Through main PLC, field control PLC and equipments obtain, it can gather accurate vacuum gauge pressure data and control all vacuum pumps and valves no mistake.
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