Abstract
In this work, by controlling the positional relationship between the target and the focal point, the surface damage, shock wave phenomenon and propagation mechanism involved in the plasma generation of fused silica by millisecond pulsed laser irradiation at different focal positions were studied. Laser energy is an important experimental variable. The dynamic process of plasma was detected by optical shadow method, and the influence of surface film damage on plasma propagation and the propagation mechanism at different focal positions were discussed. The study found that the plasma induced by the pulsed laser at the focus position within 0–20 μs exploded, the micro-droplets formed around 20 μs. At the same time, a shock wave is formed by the compressed air, the micro-droplets are compressed under the action of the shock wave recoil pressure, and the micro-droplets channel phenomenon is observed in the micro-droplets. The peak velocities of plasma and combustion wave appear earlier in the pre-focus position than in the post-focus position. This research provides a reference for the field of laser processing using fused silica as the substrate.
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