Abstract

Nanostructured Titanium Dioxide (TiO2) thin film with additional various amount of TiO2 nanopowder has been successfully prepared using sol‐gel spin coating method. The amounts of TiO2 nanopowders are varied at 0.02 g, 0.04 g, 0.06 g, 0.08 g, 0.10 g and 0.12 g, respectively. The effects of different amount of Titanium Dioxide nanopowder to the structural, electrical and optical properties have been studied. The effects of different amount of nano‐powder TiO2 were characterized using X‐Ray Diffractometer (XRD), 2‐point probe I‐V measurement and UV‐Vis‐NIR Spectrophotometer. For electrical properties, O.1 g of TiO2 nanopowder gives the lowest sheet resistance among other nanostructured TiO2 thin film. As for XRD data, all thin films are in crystalline anatase form which can observe at 2θ degree 25.6° for [101]. As the amount TiO2 nanopowder increased at 0.10 g and 0.12 g, new crystalline anatase phase can be observed at 2θ degree 48.6° for [200]. All TiO2 thin films also exhibited optical transmittance over 69% with wavelength range from 200 nm to 1000 nm.

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