Abstract
Microstructure energy conversion components, as the key components of MEMS initiating explosive device, has a significant impact on the output performance and energy utilization of the initiating explosive device, especially the design of its bridge microstructure. In order to perfect the design theory of microstructure energy conversion components of MEMS (Micro Electro-Mechanical Systems) initiating explosive device, 8 different bridge microstructure are designed for energy conversion components in this paper, and using simulation research and infrared test to carry out the research on the planar microstructure effect and the better bridge type choice of a series of bridge type. Obtained two optimization bridge structure of microstructure energy conversion components and the influence law between different microstructure and output performance of energy conversion components, and the average ignition voltage of V-50 bridge microstructure energy conversion components up to 100μF/3.5V, and the energy utilization rate is 46.6%°
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