Abstract
The centre diaphragm is a key part of the silicon piezoresistive pressure sensor with three diaphragms structure which is one major matter to the sensitivity of the output pressure value. The characteristics between the deflection at the center of the circular diaphragm and the pressure loaded on it are considered by applying the energy theory. And the nonlinear deflection and the maximal deflection formulas are derived by taking the outside pressure loaded and the pre- stress into account. The simulation of the large deflection of the diaphragm is developed by the ANSYS finite-element- method (FEM) software. And the pre-stress is loaded by applying temperature loads in the APDL module. Additionally, the maximal deflection of the centre diaphragm is measured by the micro displacement test equipment. And the testing results confirm both the correction of mathematical model and the validity of the ANSYS FEM simulation software. The results indicated that the pre-stress affect the deflection of the diaphragm of pressure sensor obviously and should not be ignored.
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