Abstract
This paper develops Micro-electromechanical Systems-based pressure sensor diaphragms (MEMS). This paper aims to build, model, and test a MEMS-based diaphragm that uses numerous structures of the same area and material to sense differential pressure. Similar goals: Diaphragm deflection and sensitivity were studied using COMSOL multiphysics software. LTspice is a high-performance SPICE simulator with a graphical schematic capture interface. The diaphragm bends when pressure changes, affecting the substrate-diaphragm displacement in COMSOL and the voltage output in LTspice via changing the resistances of three sensors. Voltage output changes with diaphragm bending. Changing voltage and displacement indicate environmental pressure. This method improves instrument response. In this work, a circular diaphragm-based pressure sensor has higher displacement, sensitivity, and stress output responses than a square or rectangular one.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: International Journal of Scientific Methods in Engineering and Management
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
