Study on the characteristics of quadrupole mass spectrometer by the UHV partial pressure standard

Abstract

This study aims to investigate the characteristics of QMG700 quadrupole mass spectrometer (QMS) with use of the ultrahigh vacuum (UHV) partial pressure standard. The research parameters were the sensitivity, linearity, secondary electron multiplier (SEM) detector gain, stability, noise level and minimum detectable partial pressure (MDPP). This work was carried out in the scan and multiple ion detection (MID) operation modes for characterization of the QMS, where both the Faraday cup (FC) and the SEM detector were used, and the dwell time and scan speed were respectively 50 ms, 1 s and 50 ms/amu, 1 s/amu, the SEM voltage was varied from 1100 V to 3000 V. The experiments were performed within the partial pressure range of 10−7 Pa to 10−5 Pa for the FC detector and over the range of 10−9 Pa to 10−7 Pa for SEM using He, N2 and Ar. The results demonstrated a significant correlation between the QMS metrological characteristics and its operation mode as well as ion current detection mode. This study was conducted according to the ISO TS 20175: 2018.