Abstract

Theoretical calculations have been performed for the temperature stability of the amorphous TeO2/36deg Y-X LiTaO3 structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. It is found that it simultaneously has a very high K2 around 8%, a pure transverse surface wave mode and a zero TCD. The TCD can reach zero when the thickness of amorphous TeO2 film is much less than that of conventional SiO2 film, which means SAW devices on such substrates can be fabricated easily.

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