Study on range distribution parameters for fluorine ion implantation in KTiOAsO 4 crystals at low velocity

Abstract

Range distributions for fluorine ions in 19F +-implanted KTiOAsO 4 (KTA) in an energy range of 80–350 keV were measured by using the 19F(p, αγ) 16O resonant nuclear reaction at E R = 872.1 keV, with width Γ = 4.2 keV. A proper convolution calculation method was used to extract the true distributions of fluorine from the experimental excitation yield curves. The experimental range distribution parameters, R p and Δ R p, were compared with those obtained from Monte Carlo simulation codes.