Study on Preparation and Properties of TiCrAlN Film on the Surface of H13 Die Steel by Multi-arc Ion Plating

Abstract

This paper studies the influence of substrate bias on the structure and performance of multi-arc ion plating TiCrAlN film on the surface of H13 die steel. Using multi-arc ion plating technology, by controlling and adjusting the size of the substrate bias, different structures and properties are prepared on the H13 die steel substrate. The research results show that when the substrate bias voltage gradually increases, the number of large particles gradually decreases, the particle distribution becomes more and more uniform, and the density of the film increases. When the substrate bias voltage rises to 100V, the number of large particles on the film surface is the least, the surface structure is evenly distributed, and the surface quality of the film is the best. The micro-hardness and film-base bonding force of the film increase with the continuous increase of the substrate bias voltage. At 100V, the film’s micro-hardness and film-base bonding force reach the maximum value, but when the substrate bias voltage exceeds a certain range, The microhardness of the film and the bonding force of the film base are greatly reduced; with the increase of the bias voltage, the corrosion resistance of the film increase, and the 100V performance reaches the best. The influence mechanism of substrate bias on the corrosion resistance of the film was analyzed.