Abstract

In order to solve the problems of high error rate and long time in the traditional signal error compensation method, a new nonlinear compensation method for the signal error of capacitance micro displacement sensor is designed. The structure of the capacitive micro displacement sensor is optimized. The signal acquisition module is used to collect the optimized capacitive micro displacement sensor signal, and the collected signal is processed by adding window interpolation FFT. According to the signal processing results, the RBF neural network model is used to realize the nonlinear compensation of the signal error of the capacitive micro displacement sensor. The experimental results show that the method has the advantages of less noise, lower compensation error rate and time consuming, and better practical application effect.

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