Abstract
A high monatomic beam fraction is an important factor in a hydrogen ion source to increase the application efficiency. The monatomic fraction of hydrogen plasmas with different plasma electrode materials is measured in a helicon plasma ion source, and aluminum shows the highest value compared to that with the other metals such as copper and molybdenum. Formation of an aluminum oxide layer on the aluminum electrode is determined by XPS analysis, and the alumina layer is verified as the high monatomic fraction. Both experiments and numerical simulations conclude that a low surface recombination coefficient of the alumina layer on the plasma electrode is one of the most important parameters for increasing the monatomic fraction in hydrogen plasma ion sources.
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