Abstract
The estimation of thin film thickness by attenuated total reflection (ATR) was proposed. This technique is caused by be fitted curve evaluated from Fresnel's formula to experimental values of reflectivity in the resonance dip due to surface plasmon. The equation for the thickness, d spr, estimated from ATR and the minimum, R min, of the resonance dip in reflectivity due to surface plasmon resonance is represented by d spr=D+√E(R min-F). The values obtained by this method were compared with those obtained by the surface roughness tester made by the Rank Tayler Hobson Company. From this comparison, the experimental formula d srt=Gd spr+H was proposed, and G and H were obtained as 0.69 and 6.7 respectively for an Ag film, 0.86 and -1.45 respectively for an Au film, and 0.67 and 8.98 respectively for a Cu film, all ranging from about 30 nm to 70 nm in thickness.
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