Abstract
Ultrasonic vibration assisted micro end grinding (UAMEG) is a promising processing method for micro parts made of hard and brittle materials. First, the influence of ultrasonic assistance on the mechanism of this processing technology is theoretically analyzed. Then, in order to reveal the effects of ultrasonic vibration and grinding parameters on grinding forces and surface quality, contrast grinding tests of silica glass with and without ultrasonic assistance using micro radial electroplated diamond wheel are conducted. The grinding forces are measured using a three-component dynamometer. The surface characteristics are detected using the scanning electron microscope. The experiment results demonstrate that grinding forces are significantly reduced by introducing ultrasonic vibration into conventional micro end grinding (CMEG) of silica glass; ultrasonic assistance causes inhibiting effect on variation percentages of tangential grinding force with grinding parameters; ductile machining is easier to be achieved and surface quality is obviously improved due to ultrasonic assistance in UAMEG. Therefore, larger grinding depth and feed rate adopted in UAMEG can lead to the improvement of removal rate and machining efficiency compared with CMEG.
Highlights
Expanding requirements of microproducts with features and structures at microscale and nanoscale, such as micro optical system, micro robot, micro motor, and fuel injection nozzle, presents stimulation and challenges to micromachining technology [1, 2]
(1) Ultrasonic assistance changes the machining mechanism of micro end grinding from the point of view of instantaneous abrasive cutting thickness (h)
(3) Ultrasonic assistance gives rise to positive influences of the variation percentage of tangential grinding force with increase of grinding parameters, because of which larger depth of cut and feed rate can be adopted in micro end grinding of silica glass to improve material removal rate and machining efficiency
Summary
Expanding requirements of microproducts with features and structures at microscale and nanoscale, such as micro optical system, micro robot, micro motor, and fuel injection nozzle, presents stimulation and challenges to micromachining technology [1, 2]. There are only limited methods existing for the process of 3D micro components of hard and brittle materials. The experiments indicate that higher grinding force will lead to more residual crack on surface and subsurface. In order to yield high surface integrity and surface accuracy in microgrinding, cutting depth and feed rate must be maintained in a quite low level to limit grinding force, which results in low removal rate and low efficiency. It is indicated by previous research on ultrasonic vibration assisted machining (UVAM) that machining quality can be significantly improved by introducing ultrasonic vibration. Starting with the investigation of vibration assisted planning, Shock and Vibration w
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