Abstract

The manufacture method of the diaphragm Fabry-Perot(F-P) pressure sensor was studied. The sensor formed an F-P cavity by welding the hollow fiber on the end face of the single mode fiber, and manufactured a quartz diaphragm by cutting and grinding the single mode fiber. A new fitting demodulation method is proposed, which can obtain the FP cavity's reflectivity, the diaphragm's outside reflectivity, the F-P cavity length and the diaphragm thickness at one time. It is highly practical for the parameter monitoring in the sensor manufacturing process. Experiments show that the sensor has high sensitivity and linearity, and has great potential application value in the field of fluid mechanics measurement.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.