Abstract
To improve the fringe contrast and the sensitivity of Fabry-Perot (FP) pressure sensors, a silicone rubber FP pressure sensor based on a spherical optical fiber end face is proposed. The ratio of silicone rubber ingredients and the diameter and thickness of silicone rubber diaphragm were optimized by a simulation based on experimental tests that analyzed elastic parameters, and the influence of the radius of a spherical optical fiber and the initial cavity length of the sensor on the fringe contrast was investigated and optimized. Pressure sensor samples were fabricated for pressure test and temperature cross-influence test. Gas pressure experimental results within a pressure range of 0~40 kPa show the average sensitivity of the sensor is −154.56 nm/kPa and repeatability error is less than 0.71%. Long-term pressure experimental results show it has good repeatability and stability. Temperature experimental results show its temperature cross-sensitivity is 0.143 kPa/°C. The good performance of the proposed FP pressure sensor will expand its applications in biochemical applications, especially in human body pressure monitoring.
Highlights
Jushuai Wu et al has reported the smallest FP pressure sensor, with a SU-8 photoresist directly coated on the end face of a single-mode optical fiber
Xin Cheng et al investigated an FP pressure sensor based on a polymer of the silicone rubber diaphragm, with a thickness of 257 μm, and its pressure sensitivity is 0.69 nm/kPa [20]
We proposed a silicon rubber fiber FP pressure sensor based on a spherspherical end fiber
Summary
Jushuai Wu et al has reported the smallest FP pressure sensor, with a SU-8 photoresist directly coated on the end face of a single-mode optical fiber It has a support structure diameter of 100 μm and a diaphragm thickness of 11 μm and shows a sensitivity of 2.93 nm/MPa in the range of 0~700 kPa [18]. Xin Cheng et al investigated an FP pressure sensor based on a polymer of the silicone rubber diaphragm, with a thickness of 257 μm, and its pressure sensitivity is 0.69 nm/kPa [20].
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