Abstract

This paper presents a kind of precision fabrication process integrating CCOS polishing with bowl-feed polishing and small tools for grinding is adopted. By analyzing and testing the parameters of each procedure of optical fabricating process of SiC mirror, Φ140mm pressure-burned lightweight SiC parabolic surface is implemented, and the surface figure with high accuracy (PV=0.16λ. RMS=0.026λ, λ=0.6328μm) and super smooth surface (Surface roughness RMS=0.94nm,Ra=0.61nm) are obtained, thus providing a technology support to optical fabrication of hard material aspheric mirror made by CCOS.

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