Research of fabrication and testing technology of monocrystalline silicon optical elements with super-smooth surfaces

Abstract

Fabrication and testing technologies of super-smooth X-ray optical elements of synchrotron radiation is a new field. It works in the short-waveband and is one of the basic contents of optical foundation engineering research of soft X-ray. This article describes optical system characteristics of synchrotron radiation light beam, research goal, significance, background, present situation of our country and comparison with overseas level in fabrication and testing technology of super-smooth synchrotron radiation optical elements. It presents domestic and foreign present situation of super-smooth optical surface fabrication technology, as well as each kind of measurement technologies of synchrotron radiation optical elements. This article relates on fabrication and testing of super-smooth optical elements made of monocrystalline silicon emphatically, systematically introduces fabrication, test method and result of the optical elements. All test results meet with the design specification. The paper also demonstrates the progress approached or achieved both at home and abroad.