Abstract

Photoacoustic sensor has become a research hotspot in the field of acoustic sensing in recent years due to its high sensitivity and anti-electromagnetic interference. A novel high- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula> grooved silica waveguide acoustic sensor (GSWAS) is proposed, which is etched and filled the Polydimethylsiloxane (PDMS) above the waveguide coupling region. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula> factor of the sensor is of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$1.82\times 10^{{6}}$ </tex-math></inline-formula> . In order to detect the sound signal easily and intuitively, an acoustic sensing system was built by using Pound–Drever–Hall (PDH) frequency locking technology, and the weak sound signal was demodulated by using the method of synchronous demodulation of high frequency modulation. Experimental results show that the designed sensor has a flat response in the frequency range of 0.4–15 kHz and can accurately detect the acoustic signal, with a high sensitivity of 1143 mV/Pa and a signal-to-noise ratio (SNR) of up to 45.19 dB under the action of acoustic signal of 8 kHz. This article explores a new method of frequency bandwidth and high sensitivity sound detection, laying a foundation in the field of acoustic signal detection such as aeroacoustics, photoacoustic imaging, and all that.

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