Abstract
A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20° × 20°, the measurement resolution is about 10.2 cm in range, 0.15° in the horizontal direction and 0.22° in the vertical direction for orientation.
Highlights
With the rapid development of the micro-optical-electro-mechanical systems (MOEMS) technology, the micromation of the payloads in micro-satellites has become a general trend [1]
The results indicate that the MOEMS target detector can receive the reflected beam from the target precisely and measure the orientation
The results indicate that the MOEMS target detector can realize the measurement of the relative range by the scanning of the micro-mirror
Summary
With the rapid development of the micro-optical-electro-mechanical systems (MOEMS) technology, the micromation of the payloads in micro-satellites has become a general trend [1]. The two-dimensional scanning micro-mirror has great advantages over the conventional scanning mechanisms, such as low power consumption, small volume and high frequency. It has a broad range of space applications for target detection in microsatellites. With the aim of improving these deficiencies, a two-dimensional scanning micro-mirror with piezoresistor sensors for measurement of deflection angles is developed in this paper. It has a simple structure and a small volume, with a large scanning field and high sensitivities. The performance of the prototype and experimental results will be described in detail
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