Abstract
In recent years, a flexure hinged micro-displacement platform driven by piezoelectric actuator is being widely used in vibration suppression and micro positioning applications for its fast response, nanometer resolution, no backlash, no friction and bigger driving force. This kind of precision micro positioning system with a high displacement resolution and wide motion range has been required for industrialized applications for a long time. This paper discusses the design and the characteristics of a flexure hinge-based micro-displacement platform driven by piezoelectric actuator, a four-bar parallel mechanism and a monolithic symmetrical mechanism are adopted in the design. An analytical model is presented and a series of formulae for the static behavior of the platform are derived. Based on the theoretical analysis, the optimum design schema is put forward. The experimental demonstration to study the performance of the platform is described, and the method for reducing nonlinearity errors is proposed. The experimental results are in close agreement with those predicted by the theoretical analysis.
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