Abstract
A precision micropositioning system with a high displacement resolution and widemotion range has been required for industrialized applications for a long time. This paper discussesthe design and the characteristics of a new piezodriven precision micropositioning stage utilizingflexure hinges. Two-grade amplifying and a monolithic symmetrical mechanism are adopted in thedesign. An analytical model is presented and a series of formulae for the static and dynamicbehaviour of the stage are derived. Based on the theoretical analysis, the optimum design schema isput forward. The experimental demonstration to study the performance of the stage is described, andthe method for reducing nonlinearity errors is proposed. The experimental results are in closeagreement with those predicted by the theoretical analysis.
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