Abstract
This study constructed an ultrasound-assisted AFM nanomachining platform by integrating an atomic force microscope (AFM) with a quartz crystal microbalance, which was subsequently used in experiments for determining the microscopic phenomena of ultrasound-assisted nanomachining. Force-distance curve measurement was used to establish a normal force measurement model, obtaining the downforce strengths during ultrasound-assisted nanomachining. Subsequently, machining experiments were conducted on monocrystalline silicon to explore the effects of various experimental parameters (e.g., machining speed and normal force) on machining depth. The experiments showed that the ultrasound-assisted AFM nanomachining platform constructed in this study is effective. After ultrasound was incorporated, monocrystalline silicon specimens made of brittle material could be more effectively processed under various experimental parameters. Moreover, the performance of ultrasound-assisted nanomachining was superior to that of general nanomachining.
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