Abstract
For the different compositions of Al2O3 ceramics and Al2O3–SiC composite ceramics, studying the effects of ceramic compositions on the surface morphology of laser direct etching, and discussing the impacts of the complex etching of water jet and laser on Al2O3 ceramics and Al2O3–SiC composite ceramics. The results show that: In the process of laser etching, Al2O3 ceramics melt evenly because of the high purity, but for Al2O3–SiC composite ceramics, Al2O3 achieves the melt firstly, SiC is difficult to decompose because of the high decomposing temperature, so it is observed that the powdered SiC without decomposing covers the surface of groove in the SEM; In the process of the composite etching of water jet and laser, water jet can wash a lot of slag covered on the surface of groove and improve the surface morphology of laser etching significantly.
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