Abstract
A wavelength of 1064nm Nd: YAG laser was used to groove on silicon, then studying the affect of quality and processing efficiency by incoming jet in laser etching course of silicon: Water jet reduced doss, cracks and other defects which might be produced on the surface of groove. Software of matlab was used to restore the topography of tank’s bottom; analysis shown that the water jet had a scouring effect influence on tank’s bottom. Introduction of the water jet caused the loss of the laser energy, but it could improve processing efficiency indirectly by blowing away the slag.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
