Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method

Abstract

This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology—ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light–sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.