Abstract
Ionizing radiation such as extreme ultraviolet (EUV) radiation and electron beams generates secondary electrons in resist materials. Acid generators are mainly decomposed by reaction with these electrons. The reaction of acid generators with solvated electrons has been well investigated. However, the reaction with electrons before solvation, in particular, during thermalization, has not been investigated because of measurement difficulties. Because the ejected electrons are not solvated in solid resist films, it is important to elucidate the reactions of acid generators with the electrons before solvation. The reactions before solvation are expected to give direct insight into the reactivity of acid generators with electrons in solid films. In this study, we investigated the reactivity of acid generators with electrons before solvation using picosecond pulse radiolysis. The dependence of reactivity on molecular structures was clarified in terms of C37 parameters.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
